Study on Sputtering Yield in Reactive Sputtering

Growth Process of Preferential Orientation of AlN Thin Films by Magnetron Reactive Sputtering

磁控溅射氮化铝薄膜取向生长工艺研究

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Hysteresis in Aluminum Oxides Films Growth with Pulsed Reactive Sputtering

铝靶脉冲反应溅射沉积氧化铝薄膜中的迟滞回线的研究

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The Study of RF Reactive Sputtering SiO_2 Film

射频反应溅射SiO2薄膜的研究

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Dielectric Characteristics of Amorphous Alumina Film Fabricated by Reactive Sputtering

反应溅射制备非晶Al2O3薄膜的介电特性

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Some Problems for the Design of the Filling Gas System of the Magnetron Reactive Sputtering Coating Equipment

磁控反应溅射镀膜设备充气系统设计的几个问题

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The aging procedure in amorphous alumina film fabricated by reactive sputtering

反应溅射制备的a-Al2O3薄膜中的时效过程

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Transparent Zinc Oxide Thin Films Prepared by DC Diode Reactive Sputtering

直流二极反应溅射沉积透明ZnO薄膜

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Deposition technology and properties of chromium oxide coatings by RF reactive sputtering

射频反应磁控溅射制备氧化铬薄膜技术及性能

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Preparation Process of Y_2O_3 Thin Film Using RF Magnetron Reactive Sputtering

射频磁控反应溅射法制备Y2O3薄膜的工艺研究

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Development and application for large-area reactive sputtering technology

大面积反应溅射技术的最新进展及应用

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Study of Processing and Properties of AIN Films Prepared by Magnetron Reactive Sputtering

磁控反应溅射AIN薄膜的制备工艺与性能研究

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Structure and Properties of ZnO Films Prepared by Ion Beam Reactive Sputtering

反应溅射氧化锌薄膜的结构特点及性质

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DC Reactive Sputtering Process for Al_2O_3 Film Deposition and Its Applications

直流反应溅射Al2O3膜工艺探讨及应用

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Carbon Nitride Films Prepared by Reactive Sputtering and Their Structural Analysis

射频溅射制备碳氮薄膜及其结构分析

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A novel kinetics model for dc reactive sputtering was proposed.

提出了一个新的直流反应溅动力学模型。

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Study on Composition and Structure of ITO Film by Reactive Sputtering

反应溅射掺锡氧化铟薄膜成份与结构的研究

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Simulation of Proportion Integration Differentiation Neural Network Control of Reactive Sputtering

反应溅射的PID神经网络控制仿真

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Study of SnO_2 Thin Film Gas Sensors from Plasma Reactive Sputtering

等离子体反应溅射生成SnO2气体传感器薄膜的研究

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Advances of Signal Transduction of Reactive Oxygen Species

活性氧信号传导作用的研究进展

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Protection of Melatonin against Damage of Sperm Mitochondrial Function Induced by Reactive Oxygen Species

褪黑素在活性氧致精子线粒体功能损伤中的保护作用

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