A new comb structure of capacitive humidity sensor is described, which is fabricated by a standard CMOS process to achieve an effective solution for accurate and reliable humidity measurement.

1、

The working principles of online inspection element taken the humidity sensor of high polymer film capacitance type as relative humidity ( RH) were elaborated.

阐述了以高分子薄膜电容式湿度传感器作为相对湿度（RH）的在线监测元件的工作原理；

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2、

His Hong-Kong based start-up, Ckicom Technology Ltd., sells a disposable adult diaper equipped with a moisture sensor and a wireless system that sends wetness alerts to nursing-home workers via personal computers and mobile phones.

他在香港的初创企业启通科技有限公司（Ckicom Technology Ltd.）销售一种一次性成人尿片，这种尿片配有湿度传感器以及一个无线系统，可以通过个人电脑和手机向养老院护工发送尿湿程度警报。

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3、

It is illuminated that grid Au upper electrode has more uniform electric field, and slot electrode has larger interface with environment, consequently larger sensitivity.

研究结果表明，电容式湿度传感器栅格结构的Au上电极具有均匀的电场，而条形上电极结构聚酰亚胺感湿薄膜与外界的接触面积更大，拥有更大的灵敏度。

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4、

Through the analysis of the polyimide humidity sensitive mechanism, the structure of humidity sensor was designed and the humidity sensor manufacture process was discussed in detailed.

通过对湿敏材料&聚酰亚胺（PI）的湿敏机理的分析，设计了高分子电容式湿度传感器的芯片结构，并对其制作工艺进行了详细讨论。

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5、

Three kinds of SiO2 gel have been prepared by sol-gel method and then porous SiO2 thick film humidity sensors are made.

用Sol－Gel方法制备了三种SiO2凝胶，并以此制造了多孔SiO2厚膜湿度传感器。

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6、

Temperature and humidity sensor signal to temperature and humidity signals into electrical signals, after signal conditioning and AD conversion, and finally obtain the corresponding concentration value.

温湿度传感器通过把温度信号和湿度信号转换成电信号，经过信号调理和AD转换，最后得到相应的浓度值。

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7、

A CMOS compatible integrated humidity sensor is designed and fabricated. The humidity sensor and CMOS circuits are fabricated at the same chip.

设计并制备了一个CMOS工艺兼容的集成湿度传感器，将湿度传感器与CMOS测量电路集成在同一芯片上。

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8、

Consequently, the novel humidity sensor provides the high reliability, the better hysteresis, sensitivity and linearity with the standard CMOS process.

最后本文给出的这种利用CMOS技术制造的湿度传感器具有较高的灵敏度、较好的滞回特性、可靠性、线性度和短的响应时间等。

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9、

Properties of the Polyimide Capacitive-type Humidity Sensor Based on Si Substrate with a SiO_2 Insulation Layer

具有SiO2绝缘层的硅基聚酰亚胺电容式湿度传感器的特性研究

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10、

Development of a polyimide film capacitive gate FET humidity sensor

聚酰亚胺薄膜电容栅FET湿度传感器的研制

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11、

The drift mechanism of porous Al2O3 capacitive-type humidity sensors 2as detailed and the suggestion of minimizing the drift were proposed.

对其原因进行了探讨，从而对多孔Al2O3电容式湿度传感器响应的长期漂移机理进行了详细讨论，并指出了克服或改善这类湿度传感器漂移的方向。

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12、

Design of intelligent capacitive humidity sensor based on HART communication agreement

基于HART协议的智能电容湿度传感器设计

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13、

Improvement of Hysteresis and Drift Characteristics of Humidity Sensors of ZrO_2 and Its FPGA Realization

ZrO2湿度传感器湿滞和温漂特性改善研究及其FPGA实现

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14、

Research of Capacitive Humidity Sensor Compatible with CMOS Technology DEVELOPMENT OF POLYIMIDE FILM-BASED CAPACITIVE TYPE HUMIDITY SENSOR

基于CMOS工艺的电容型湿度传感器研究聚酰亚胺（PI）薄膜电容型湿度传感器的研制

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15、

This controller has adopted the digital temperature and humidity sensor, the controller module of carbon dioxide.

该控制器采用了数字温湿度传感器，CO2传感器模块。

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16、

This humidity sensor was fabricated with the standard CMOS technology and the MEMS post-processing step.

研究所用的微电容湿度传感器由标准CMOS工艺结合MEMS后处理技术加工而成。

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17、

Accurate measure method of capacitive humidity sensor based on harmonic analysis measure method and realization based on DSP

基于谐波分析测量法的湿度传感器的精确测量方法及其DSP的实现

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18、

Design of trace moisture on-line measurement system based on a new type of Al_2O_3 humid sensor

基于新型Al2O3湿度传感器的微量水分在线检测系统设计

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19、

Preparation of Si-Based PI Humidity Sensor by CMOS Process

基于CMOS工艺的硅基PI湿度传感器的研制

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20、

A Study on Al_2O_3 Capacitive Humidity Sensor

一种电容式Al2O3湿度传感器

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