mems

ZnO piezoelectric thin film pressure sensor by MEMS fabrication has the advantage of high sensitivity and miniaturization. It is difficult to make the preparation process of the composite micro-cantilever sensor, and there are compatibility technology problems between the layers.

采用MEMS工艺制作的ZnO压电薄膜压力传感器，具有体积小、易集成、灵敏度和信噪比高等优点。但是复合微悬臂梁式传感器制备工艺较难，各层薄膜工艺存在兼容性问题。

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With the rapid development of MEMS, study of micro helicopter has been a hotpot in this field.

随着微电子机械系统（MEMS）的迅猛发展，自主式微直升机的研究也已成为这一领域内的研究热点之一。

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MEMS material database is a necessary tool for MEMS design.

MEMS材料数据库已经成为MEMS设计领域中必不可少的设计工具.

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A novel dual-band MEMS LNA design bimetal strip-type fixed temperature detector

一种双波段MEMS低噪声放大器设计双金属定温火灾探测器

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The compensating method for MEMS gyroscope random drift error is discussed.

从工程实用的角度出发,探讨了MEMS陀螺仪随机漂移误差的有效补偿方法.

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Then, the side feed pattern reconfigurable antenna is improved and the structure is suitable for processing. Last, the processing and test of MEMS reconfigurable antenna is studied and discussed, a processing scheme which is suitable for the antenna design is proposed.

之后对侧馈形式的方向图可重构天线进行了改进，得到了适合加工的天线结构；最后，对MEMS可重构天线的加工测试进行了讨论和研究，提出了适合于所设计天线的加工方案。

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The widely use of MEMS prompted the extensive research of Power MEMS.

随着微机电系统(MEMS) 的快速发展,为MEMS提供 电能的微小型功率器件(PowerMEMS)逐步得到了广泛的研制.

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The study on fabrication process of a high k capacitive MEMS switch is presented.

介绍了一种电容式MEMS开关的制作工艺。

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A Study on the Test Technique for RF MEMS CPW Switch

射频微机械共面波导开关测试技术研究

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It is useful for the design and researchment of MEMS devices.

这对MEMS器件的设计与研究具有重要意义.

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Studying on dynamic characteristic of MEMS micro-device depends on relevant testing system.

MEMS微器件动态特性的研究需要相应的测试系统.

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Micro ( small) thermoelectric generation device is one of the research programs for Power MEMS.

微小型热电电源是其中的一种得到开展的研究课题。

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Polyimide has become a main material for sacrificial layer in MEMS switch.

目前,聚酰亚胺已成为MEMS开关中一种主要的牺牲层材料.

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The automatic optimization algorithms of structural parameters of MEMS devices are studied.

研究了MEMS器件结构参数的自动优化算法及其实现技术.

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A MEMS sensor research platform based on micro-converter AD μ C 832 is presented.

提出一种基于微转换器(Micro-Converter)的MEMS传感器组合研究平台.

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Development of MEMS at the Turn of the Century

下世纪初微电子机械系统的发展

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A survey of current international research on MEMS is presented.

本文对国外微电子机械系统(MEMS) 的研究现况作了评述.

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A micro direct methanol fuel cell ( μ DMFC ) using MEMS technology is reported.

报道了一种利用MEMS技术制作的微型直接甲醇燃料电池.

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As a packaging technique, COB ( Chip on Board) structure is usually used in IC and MEMS. However, the thermomechanical coupling effect because of CTE mismatch of different materials in COB will greatly affect the reliability and performance of the devices.

COB（chip on Board）是微电子和MEMS中常用的封装工艺之一，但该封装结构中由于多层异质材料耦合引入的热失配将对器件的性能和可靠性产生重要影响。

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Piezoelectric actuator is one of the most development prospects in MEMS actuators.

压电驱动是微机械系统(MEMS)微执行器最有发展前途的驱动方式之一.

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Fabrication of a RF MEMS Switch Using High k Materials as Dielectric Layer

高介电常数介质RF MEMS开关的制作研究

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After feasibility analysis and parameter optimization, a teeterboard pattern MEMS permanent magnet bistable structure supported by a torsion and cantilever beam is fabricated with sacrificial layer technology of non-silicon surface micro fabrication.

在进行理论分析证实可行性和模拟仿真优化参数后，利用非硅表面微加工方法中的牺牲层工艺制备了一种扭梁悬臂梁支撑的扭摆式MEMS永磁双稳态机构。

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The State of the Art in Technologies and Applications of MEMS

MEMS技术及应用的新进展

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A RF MEMS switch is designed by computer aided design ( CAD ) method.

应用计算机辅助设计 ( CAD ) 方法模拟设计一种射频微机械(RF-MEMS)开关.

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In this thesis, we give full consideration to the compatibility with CMOS technology and fabricate MEMS thermopile IR detector through designing a front-cut thermopile structure.

在本文中，我们充分考虑了与CMOS工艺的兼容性，通过设计一种正面开口的热电堆结构，制作了微机械热电堆红外探测器。

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Study of Measurement Methods on Thin-film Thermophysical Properties for MEMS Applications

MEMS中薄膜热物性测试方法研究

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The development of Power MEMS is associated with MEMS closely.

PowerMEMS (功率微机电系统)与MEMS( 微机电系统)发展密切相关.

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Design and phase noise analysis of a MEMS varactor is presented.

给出了一种MEMS压控电容的设计和相位噪声分析结果.

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Improved temperature error model of silicon MEMS gyroscope with inside frame driving

改进的内框架驱动式硅MEMS陀螺温度误差模型

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Then, communication devices based on MEMS technology their applications are reviewed.

重点综述了基于MEMS技术的通信器件及其应用.

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