1、

results show that sin films with a low hydrogen content can be prepared by hwp cvd at a higher rate and lower substrate temperature, and the main bond mode in the deposited sin films is si& n stretching mode.

结果表明,采用HWP CVD技术能在低衬底温度条件下以较高的沉积速率制备低H含量的SiN薄膜,所沉积的薄膜主要表现为Si&N键合结构。

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2、

Effect of the Substrate Temperature on the Formation of SOI Materials by O Ion Implantation

基片温度对氧离子注入硅形成SOI材料的影响

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3、

As substrate temperature continuing rising, sp~ 3 bond proportion gradually decrease.

随着基底温度的继续增加,sp~3键含量逐渐下降。

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4、

results show that sin films with a low hydrogen content can be prepared by hwp cvd at a higher rate and lower substrate temperature, and the main bond mode in the deposited sin films is si& n stretching mode.

结果表明,采用HWP CVD技术能在低衬底温度条件下以较高的沉积速率制备低H含量的SiN薄膜,所沉积的薄膜主要表现为Si&N键合结构。

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5、

results show that sin films with a low hydrogen content can be prepared by hwp cvd at a higher rate and lower substrate temperature, and the main bond mode in the deposited sin films is si& n stretching mode.

结果表明,采用HWP CVD技术能在低衬底温度条件下以较高的沉积速率制备低H含量的SiN薄膜,所沉积的薄膜主要表现为Si&N键合结构。

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6、

The transmittance and reflectivity in the visible region of these films lowed with the increasing of the substrate temperature.

在可见光区域薄膜透射率和反射率随着基板温度的提高均有所下降。

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7、

In a resistance thermal vacuum evaporator with a special heater ( coolant) holder, which can control the sample substrate temperature, Au and In 2O 3 films were deposited on glass slides by a thermal and an activated reactive evaporation technique, respectively.

用带特殊热(冷)阱的可控制基片温度的电阻加热式真空蒸镀薄膜装置,把吸收透明导电薄膜Au和In2O3分别通过热蒸镀和活化反应淀积在玻璃基片上。

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8、

The effects of substrate temperature, reaction gas pressure, and RF power on the structural and optical properties of the prepared films are studied. Their optimal values are 700 ℃, 2 × 133Pa and 200W, respectively.

实验结果表明,衬底温度、反应气压及射频功率对金刚石膜的结晶习性、表面粗糙度及光透过率均有很大程度的影响,其最佳值分别为700℃,2×133Pa和200W。

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9、

The splashing did not occur in the higher substrate temperature range (> 573 K) and the splat morphology changed to a disk type.

当衬底温度较高时(>573K),溅射不再发生,熔滴的扁平粒子呈现规则的圆盘状;

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10、

The methane concentration and the substrate temperature were studied.

着重研究了甲烷浓度、基体温度等工艺参数对热丝CVD法金刚石薄膜显微结构与性能的影响。

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11、

results show that sin films with a low hydrogen content can be prepared by hwp cvd at a higher rate and lower substrate temperature, and the main bond mode in the deposited sin films is si& n stretching mode.

结果表明,采用HWP CVD技术能在低衬底温度条件下以较高的沉积速率制备低H含量的SiN薄膜,所沉积的薄膜主要表现为Si&N键合结构。

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12、

In addition, the optical loss increases with substrate temperature rising.

此外,随着基板温度的提高,损耗也会有所增加。

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13、

The properties of ZnO film are strongly dependent on preparation techniques which include substrate temperature, oxygen partial pressures ( OPP), annealing process.

ZnO薄膜的光电学性质强烈依赖于其制备的工艺条件,如:基片温度、氧分压以及退火处理等。

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14、

As substrate temperature rises, islands coalesce and grow into larger ones on the surface.

AFM分析表明,薄膜为岛状生长,随温度升高,表面生长岛尺寸增大,岛密度变小。

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15、

The effects of substrate temperature and Na contents in target on properties of ZnO thins films were studied by XRD, SEM and Hall.

通过XRD、SEM和Hall等测试手段研究了衬底温度和靶材中Na含量对ZnO薄膜性能的影响。

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16、

ITO films with low sheet resistance can be obtained by raising the substrate temperature during deposition or annealing in the inert gases at high temperature.

低电阻率的ITO膜可以通过提高沉积时的衬底温度或高温退火来获得。

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18、

TiN thin film with ( 002) preferred orientation was grown by the DC magnetron sputtering at the condition of pure N_2 reacting gas, 1.6 A of the current of DC sputtering and 500 ℃ of the substrate temperature.

应用直流磁控溅射方法,在500℃的衬底温度、纯氮气的溅射气体、800w溅射功率的条件下制备出(002)择优取向的TiN薄膜。

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19、

It is found that the temperature gradient of solidifying front edge could be reduced by reducing focused lamp intensity and increasing substrate temperature.

发现适当降低聚焦加热灯强度、提高衬底加热温度可以降低固化前沿温度梯度,从而降低亚晶界等缺陷密度。

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