英语词典
Effective sampling points are thickened by using a variable-speed scanning scheme, i.e., scanning speed is low at hole edge and fast in the center, thus both repeatability at X and Y directions of the central coordinate are less than 4 microns.
采用边缘慢、中部快的变速扫描方案，密化了有效采样点，使圆心坐标在X，Y方向的重复度均小于4μm。
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