1、

The silicon chip of dual-E form non-integral structure has been introduced, which is prepared by the technique of anisotropic wet etching of silicon and the sensor of pressure sealed and packaged based on this chip.

介绍利用硅的各向异性腐蚀工艺腐蚀出的一种双E形结构非整体结构弹性膜硅芯片及用此芯片封装成的压力敏感元件。

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2、

This paper mainly discusses two key techniques thai determine the performance of poly-silicon pressure sensor: anisotropic etching and temperature self-compensation.

研究了决定多晶硅压力传感器性能的两项关键技术:各向异性腐蚀硅杯和温度自补偿。

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3、

In piezoresistive pressure sensor packaging process, the thermocompression wire bonding was studied to meet the outer interconnection of silicon gauge.

为满足压阻式压力传感器封装工艺中硅芯片外引线键合的要求,研制了热压焊简易装置;

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4、

Requirement of Substrate in thin film magneto sensor is reported. In accordance with the requirement, We select silicon and ferrite of high density as substrate. SiO2 is made insulation film on the substrate.

本文论述了薄膜磁敏元件对基片的要求,依此要求选择硅和高密度铁氧体为基片,上面制备SiO2作绝缘膜。

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5、

The piezoresistive coefficient of silicon is a function of temperature and so the thermal zero drift and thermal sensitivity drift occur in piezoresistive pressure sensor, that is the main reason of causing measurement accuracy reducing.

但由于扩散硅的压阻系数是温度的函数,使得压阻式压力传感器存在零点温度漂移和灵敏度温度漂移,这是影响压力检测系统测量精度的主要原因。

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6、

Research and Development of Silicon Thermal Flow Sensor

硅热流量传感器的研究与发展

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7、

Based on the silicon thermal flow sensor, a FEA model is given.

基于作者所在实验室研制的硅热流量传感器,给出了其有限元模型。

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8、

The principles and applications of a silicon thermal flow sensor are introduced in detail.

本文详细地介绍了硅热流量传感器的工作原理并对它进行了细致的分类,同时概括了其发展和应用情况。

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9、

Integrated Silicon Thermal Flow Sensor

集成硅热流量传感器

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11、

The Study on the Thermal Microfluidic Sensor Based on Silicon

硅基热流式微流量传感器研究

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12、

Thermal Simulation of Silicon Gas Flow Sensor and Its Packaging

硅热流量传感器封装的热模拟分析

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13、
14、

Research on A Silicon Micro Flow Sensor with a Cantilever Paddle

阀片式硅微流量传感器的研究

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15、

The structure, preparation and properties of amorphous silicon ( a-Si) material were de-scribed. The application of a-Si in sensors, such as photodiode, colour sensor, X-ray sensor and stress sensor etc.

叙述了非晶硅半导体的结构、制备方法及特性,介绍了非晶硅在制作光电传感器、色敏传咸器、放射线(X射线等)传感器及应变传感器等方面的应用。

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16、

The sintering for silicon nitride ceram micromechanical sin beam resonant pressure sensor

微机械氮化硅梁谐振式压力传感器

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17、

Application on a type of silicon resonant pressure sensor validates the rationality and affectivity of this method.

某型硅谐振压力传感器的应用验证了本方法的合理性和有效性。

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18、

A Digital Tachometer Using Three Points Magnetic-resistance Sensor of Silicon

硅三端磁阻传感器数字式转速表

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19、

A portable vehicle braking test meter is introduced, which apples the technology of intelligent data processing and whose detect component is silicon capacitate acceleration sensor.

介绍一种采用硅微电容式加速度传感器作为检测部件,应用智能化数据处理技术制成的便携式汽车制动性能测试仪。

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20、

In order to design and fabricate the flexible force sensor, we have researched the piezoresistivity of silicon rubber/ carbon black composites and given the academic calculation formula between pressure and electrical resistivity.

我们对柔性挤压应力传感器,炭黑/硅橡胶复合材料的压阻特性进行了研究,提出了其压力-电阻的简化理论计算公式。

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