1、

ZnO piezoelectric thin film pressure sensor by MEMS fabrication has the advantage of high sensitivity and miniaturization. It is difficult to make the preparation process of the composite micro-cantilever sensor, and there are compatibility technology problems between the layers.

采用MEMS工艺制作的ZnO压电薄膜压力传感器,具有体积小、易集成、灵敏度和信噪比高等优点。但是复合微悬臂梁式传感器制备工艺较难,各层薄膜工艺存在兼容性问题。

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2、

Optical Fiber Bragg Grating Pressure Sensor Based on Thin-Walled Cylinder Structure with Temperature Compensation

带温度补偿基于薄壁圆筒结构的光纤光栅压力传感器

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3、

Various performance compensation methods have been designed according to the characteristic of the thin film pressure sensor.

针对薄膜压力传感器的特性,设计各种性能补偿方法。

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4、

Polysilicon Thin Film Pressure Sensor with Stress Concentration

应力集中式多晶硅薄膜压力传感器

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5、

In view of the shortages of the existing sensor in testing rigid load and semi-rigid load, a new strain beam sensor is developed. The component structure and working principle of the new sensor is introduced, and the advantages of this new earth pressure sensor are summarized.

针对现有土压力传感器在测试刚性、半刚性荷载时的不足,研发了一种新型的应变梁式土压力传感器,着重介绍了该传感器的结构组成和工作原理,分析总结了该传感器的优点。

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6、

Data Acquisition and Temperature Compensation Design of Pressure Sensor Based on DSP

基于DSP的压力传感器信号采集与温度补偿设计

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7、

The Function of ADC in Temperature Compensation of the Pressure Sensor

模数转换器在压力传感器温度补偿中的作用

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8、

A method of temperature compensation for pressure sensor is introduced, and it resolves the problem which is about the temperature excursion of pressure sensor.

介绍了一种压力传感器的温度补偿方法,这种方法解决了压力传感器温度漂移的问题。

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9、

For plate rolling mill, the influence of slab temperature, head end immersion at biting, use of AGC system, pressure sensor and broadening ratio on oversize in thickness of plate at head and tail ends is analyzed.

基于四辊中厚板轧机,分析了温度、头部沉入、AGC系统、压力传感器和展宽比对中厚板头尾厚度超差的影响。

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10、

This paper mainly discusses two key techniques thai determine the performance of poly-silicon pressure sensor: anisotropic etching and temperature self-compensation.

研究了决定多晶硅压力传感器性能的两项关键技术:各向异性腐蚀硅杯和温度自补偿。

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11、

A Study on the Temperature Coefficient of Sensitivity Self-compensation Technology of Polysilicon Pressure Sensor

多晶硅压力传感器灵敏温度系数自补偿技术研究

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12、

The temperature compensation experiment has been completed for pressure sensor, which can realize the temperature compensation within effective compensation range.

对压力传感器进行温度补偿实验,能在有效的范围内进行温度补偿。

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13、

Research on Pressure Sensor Auto Comprehensive Test System Controller

压力传感器自动综合测试系统控制方法研究

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14、

In piezoresistive pressure sensor packaging process, the thermocompression wire bonding was studied to meet the outer interconnection of silicon gauge.

为满足压阻式压力传感器封装工艺中硅芯片外引线键合的要求,研制了热压焊简易装置;

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15、

Design And Production Of Thick Film Ceramic Capacitive Pressure Sensor

厚膜陶瓷电容式压力传感器设计与制备

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16、

Design of Amplifying Circuits in the Thick Film Integrated Pressure Sensor

厚膜集成压力传感器放大电路设计

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17、

Research on pressure sensitive component of novel thick film ceramic capacitive pressure sensor

新型厚膜陶瓷电容式压力传感器感压元件研究

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18、

Abstract A polysilicon thin film pressure sensor is presented.

介绍一种以多晶硅薄膜为敏感材料的压力传感器。

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19、

Developing of Diamond Thin Film Pressure Sensor

金刚石薄膜压力传感器研制

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