1、

Influence of Target Power Density on Ga-Doped ZnO Thin Films Prepared by Middle-Frequency Alternative Magnetron Sputtering

功率密度对中频磁控溅射制备的氧化锌镓薄膜性能的影响

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2、

Some main contents and innovations in this paper are listed as follows: I. Copper nitride thin films were prepared by reactive radio-frequency magnetron sputtering of pure Cu target on glass substrates with various N2 flow rate.

主要内容和创新点如下:Ⅰ.以纯铜靶和氮气为原料,采用反应射频磁控溅射法在玻璃基底上成功制备了氮化铜纳米薄膜。

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3、

ITO conductive films respectively with ITO target and In-Sn target were deposited on glass substrates by DC magnetron sputtering method.

采用直流磁控溅射法,分别用ITO陶瓷靶、In-Sn合金靶,在玻璃基片上镀膜。

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5、

Development and trend of transparent conductive thin films and target whose general property is perfect by magnetron-sputtering are summarized.

阐述用磁控溅射技术制备综合性能优良的ZAO透明导电薄膜及其靶材的发展现状和趋势。

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6、

Study on movement of charged particles and etched profile on target surface during magnetron sputtering

磁控溅射带电粒子的运动分布以及靶面刻蚀形貌的研究

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7、

C. Magnetron Sputtering in this paper. The TCR ( Temperature Coefficient of Resistance) of the films were less than 20 × 10-6/ ℃ using optimized deposition parameters, which were adjacent to the bulk material, realized the films of manganin pressure sensors.

根据薄膜理论和工艺实验,采用直流磁控溅射技术对薄膜沉积的工艺参数进行了优化,获得了电阻温度系数TCR≤20×10-6/℃的锰铜薄膜,与块材接近,实现了锰铜压力传感器的薄膜化。

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8、

The microwave high temperature tube reactor consists of an anode power, a filament power, an electrical systems and a cooling system of the magnetron and the electrical components.

此外,该微波高温管式反应器还包含了阳极电源、灯丝电源、电气系统以及磁控管和电器元件的冷却系统。

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9、

Co/ Cu/ FeNi three terminal device prepared by magnetron sputtering

磁控溅射制备Co/Cu/FeNi三端结器件

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10、

Big Discovery: The magnetron worked even better on popcorn.

大发现:磁控管被用以制造微波炉,用它来做爆米花效果更好!

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11、

The photoelectric property and thermoelectromotive force of CdIn_2O_4 or CIO thin film deposited by way of DC reactive magnetron sputtering process were investigated, as well as the effects of the O_2 concentration in reacting gas and annealing process on the property of CIO films.

研究了直流磁控反应溅射制备三元化合物CdIn2O4薄膜(简称CIO膜)的光电性质和温差电动势,及其反应气体中氧浓度和退火处理对CIO膜性质的影响。

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12、

Computer Simulation of Thin Film Deposition by RF Magnetron Sputtering

射频磁控溅射沉积薄膜的计算机模拟

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13、

The planar magnetron sputtering target for α-si: h thin film deposition

淀积α-Si:H薄膜的磁控靶

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14、

Thin film deposition by ICP-enhanced nonequilibrium magnetron sputtering process For ICP AES analysis.

射频等离子体增强非平衡磁控溅射沉积技术分析过程冗长,不利于生产质控。

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15、

Since magnetron sputtering is an extremely effective thin film deposition method of high-speed, low-temperature and low-damage, we deposit aluminum oxide films by RF reactive magnetron sputtering, and study their preparation and properties in theory and experiments.

鉴于磁控溅射作为一种高速、低温、低损伤的十分有效的薄膜沉积方法,我们选择射频反应磁控溅射法制备A1203薄膜,从理论和实验上研究了Al203薄膜的制备和性能。

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16、

RF magnetron sputtering has been applied to SiO 2 deposition for a long time, but for economic mass production of film coating on large size its use is limited due to the higher cost and lower efficiency.

磁控溅射法制备SiO2膜传统上采用射频溅射工艺,但它成本较高,效率较低,无法充分满足大面积镀膜工业生产的需要。

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17、

For stable operation of the magnetron, the preoscillation voltage should be lower than ehe threshold voltage, while the mode of this space charge oscillation should be the same as the π mode oscillation on the resonating cavities.

为了使磁控管能稳定工作,就要使预振电压低于门槛电压,并且使空间电荷振荡的模式与谐振腔上高频振荡的π模同步。

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18、

Experiment and Design for Reducing the front Time Jitter of Coaxial Magnetron

降低同轴磁控管前沿抖动的实验与工程设计

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19、

Through analysis we review methods fabricating thin film cathode, including chemical acetate base solution technique, sol-gel method, laser ablation, plasma enhanced chemical vapor deposition, pulsed laser deposition, radio frequency magnetron sputtering deposition, and electrostatic spray deposition.

评论了近年来制备薄膜阴极的方法,包括化学酸基溶解法、溶胶-凝胶法、激光焙烧法、增强型等离子体化学气相淀积法、脉冲激光法、电子束喷射沉积法和射频磁控溅射法。

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20、

Effect of Target Current on Structure and Characteristics of the Hydrogen-free Carbon Films by Unbalanced Magnetron Sputtering

靶电流对非平衡磁控溅射制备无氢碳膜结构与性能的影响

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