By inserting a piece of pupil phase mask in the pupil plane of an optical system, the wavefront coding technique can increase the depth of focus by an order, and the focus-elated aberrations can also be corrected.

It not only affects process windows, i.e., exposure latitude ( EL) and depth of focus ( DOF), but also degrades mask error factor ( MEF), which can introduce extra mask cost.

它不仅影响工艺窗口，即，曝光容裕度和焦深（DOF），而且也降低了掩模误差因子（MEF），这能导致附加的掩模费用。

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It is indicated that the depth of focus of the digital holographic imaging system is not only related with the numerical aperture and the reference wavelength, but also related with the configuration and the offset of reference wave.

指出了数字全息成像系统的焦深不仅与记录时的数值孔径及参考光波长有关，还与具体的光路结构及参考光的偏置有关。

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As a resolution enhancement technique ( RET), off-axis illumination ( OAI) can enhance resolution and improve depth of focus ( DOF) through adjusting illumination.

作为分辨率增强技术（RET）之一，离轴照明技术（OAI）通过调整照明方式，不但能提高分辨率还能很好地改善焦深。

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お? Placing a diffractive optical element ( DOE) on the incident laser beam to improve the depth of focus, the DOE'S aperture is variable.

在入射光束的孔径受限制的情况下，利用衍射光学元件来增加激光束的焦深。

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Because of its larger depth of focus and higher penetration power, hard X-ray microscopy can overcome the limitation of soft x-ray microscopy which has difficulty in imaging thick cells.

而硬X射线显微术因为焦深大、穿透能力强，因此可以克服软X射线显微术难以成像较厚细胞的缺陷，具有重要的应用价值。

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It is pointed out that the depth of focus, diffraction from aperture and radiation scattering are three main sources for image blurring of CCD receiving system.

指出了景深、可见光衍射、辐射输运是CCD图像接收系统模糊效应的3个影响因素。

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The aerial image qualities of depth of focus ( DOF) and optical proximity effect are simulated with the lithography simulation software PROLITH.

利用光刻仿真软件PROLITH，进行了掩模版空间成像的焦深（DOF）和光学临近效应的仿真。

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A novel method for measuring dense-line depth of focus ( DOF) of a lithographic projection system is proposed.

提出了一种检测光刻机投影物镜密集线焦深（DOF）的新技术。

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First experimental data on imaging demonstrated a large gain of depth of focus ( DOF), while maintaining image contrast at high scan speed.

最初的浸液式曝光实验数据证明了焦深的增加较大，同时以高扫描速度保持了图像的对比度。

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The principle of oblique illumination for improving photolithographic resolution and increasing depth of focus is presented with partially coherent theory.

本文用部分相干光成像理论研究了提高分辨力及增大焦深的原理.建立了二元光栅倾斜照明成像数理模型。

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A graticule for the MACROSEISMIC determination of the depth of focus of an earthquake

用宏观方法测定震源深度的量版

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The technique is not only extending the depth of focus but also decreasing the cost and increasing the allowable error of the system.

该项技术不但可以增加光学系统的焦深，也能够通过去除系统光学面的方法降低系统成本、提高系统装配允差和系统对环境的适应性。

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The property of the large depth of focus imaging system is analyzed with light chart and MTF, and the result is discussed.

从光线图和系统的MTF两个方面对大焦深成像系统的特性进行了分析，并对结果进行了讨论。

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Digital image fusion technique based on multi-focus series microscopy images is an effective method to extend the depth of focus.

利用图像处理技术实现序列显微图像的融合显示是解决显微成像焦深有限的有效方法。

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In-Situ Measurement Method of Dense-Line Depth of Focus of a Lithographic Projection System

基于光学对准的光刻机投影物镜密集线焦深原位检测技术

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Differential Haar-Gaussian wavelet transform and its application to edge detection with large depth of focus

微分Haar-Gaussian小波变换在大景深物体边缘测量中的应用

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Exposure energy, improvement of resolution and depth of focus are compared with that of conventional condition.

主要就曝光能量，分辨力改善情况，焦深变化等与传统情况作了比较。

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Research of the extension of the depth of focus based on hybrid optical digital wavefront coding technique

基于波前编码的光数混合景深延拓技术的研究

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MACROSEISMIC method determining depth of focus taking into account absorption

考虑吸收时确定震源深度的宏观地震方法

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Research on an Iris Capturing Technology by Extending the Depth of Focus

扩大焦深的虹膜采集方法及实现技术研究

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