The Research about the Method of Analysing the Soft Diagnosis of the Stepper Motor System

Application and Research on Alignment System for Stepper

分步投影光刻机对准系统应用与研究

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Realization of Point Control Based on Stepper Motor Controlled by PLC

采用PLC控制步进电机实现点位控制

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A Correct Deviation Control System Driven by Stepper Motor

一种采用步进电机的纠偏控制系统

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The Unified State Equations of the Hybrid Stepper Motor Drive System

混合式步进电机驱动系统的统一状态方程

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Then the stepper motor control program was developed using motion logic.

最后，通过Motion Logic软件编程，开发了步进电机速度控制程序。

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Investigation of dynamic characteristics of stepper motors under real-time smooth tracking control

实时连续跟踪控制下的步进电机的动特性研究

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High Accuracy Control of Stepper motor Based on Labwindows/ CVI

基于Labwindows/CVI的步进电机高精度控制

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A Stepper Motor Precision Position Controlling Based on DDS Technology

基于DDS技术实现步进电动机精确定位

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The thesis analyses the work principle and operating characteristics of hybrid stepper motor.

论文分析了混合式步进电动机的工作原理和运行特性。

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The overlay accuracy is one of the most important specifications of the stepper.

套刻精度是步进式光刻机最重要的指标之一。

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Research on a New Structure of Precision Piezoelectric Linear Stepper Actuator

新型压电步进直线精密驱动器结构的研究

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Measurement and Analysis of Critical Parameters for 0.5 μ m Stepper

0.5μm分步光刻机关键参数测量与分析

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Numerical Intelligent-based Stepper Motor Driving System Used in NC

经济型智能化数控步进电机驱动系统

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Pneumatic Stepper& A New Type Pneumatic Automatic Control Element

气动节拍器&新型自动控制气动元件

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Designing of High Precision Angle Position Tracking System for Stepper Motor

高精度步进电机角度位置跟踪系统设计

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The design of impulse signal controller in stepper motor based on FPGA

基于FPGA实现步进电机脉冲信号控制器设计

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Research of Stepper Motor Controlling System in Numerical Control Reformation of General Lathe

普通车床数控改造中步进电机控制系统的研究

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Interface Design of Computer Real Time Control System for 0.8~ 1 μ m Wafer Stepper

0.8～1μm分步重复投影光刻机计算机实时控制系统接口设计

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Analysis of Using Power Amplifier to Drive Stepper Motor

基于功率放大器的步进电机驱动控制

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The Design of Soft Start and Stop Control for Stepper Motor Based on PLC

基于PLC的步进电动机软起、停控制设计

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