Gas flow distribution of reaction chamber of inductively coupled plasma ( ICP) etcher is usually considered to be a main factor in determining both the plasma distribution and etching uniformity.

  • 感应耦合等离子体(ICP)刻蚀机反应腔室的气流分布是影响等离子体分布与刻蚀工艺均匀性的重要原因之一。
  • 来源:互联网摘选更新时间:2026-07-14 01:55:11

  • 重点词汇
  • consideredadj.经过仔细考虑的;经过深思熟虑的;受尊敬的;经过深思熟虑的看法;
  • ofprep. 关于;属于…的;由…制成;
  • coupledadj.连结的,联系的;
  • toprep. 向,朝着;到;关于;属于;
  • aart. 一(个);每一(个);任一(个),用于辅音音素开头的单词前
  • bev. 是;有,存在;做,成为;发生;
  • bothadj.二者,两者都;
  • reactionn.反应(能力);不良反应;化学反应;抗拒,反对;
  • determiningv.(使)下决心, (使)做出决定( determine的现在分词 );决定;确定;使决定;
  • 相关例句
1、

Deposition was carried out by passing gaseous mixture of hydrocarbon and hydrogen through a heated reaction chamber, in which a hot tungsten filament was held near the substrates.

合成过程中碳氢化合物和氢气的混合气体通入由热丝辐射加热的沉积室内,基体硅片置于热丝下方附近。

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2、

The technology specific of the NO detection system based on CL that we developed and the important parts in the system such as Reaction Chamber, Ozonator is introduced in the paper.

本文介绍了我们研制的NO化学发光法检测系统和系统中反应室、O3发生器等重要部件的技术细节。

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3、

An integrated microstructure PCR-DNA amplification biochip based on MEMS technology was fabricated, which includes heater, temperature sensor, reaction chamber and inlet channels.

基于MEMS技术研制了微结构的集成PCR-DNA分子扩增生物芯片,芯片集成了加热子、温度传感器、反应室、进样通道等;

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4、

Particles move down to the lower reaction chamber from the upper reaction chamber, and then are lifted to upper reaction chamber through a riser.

颗粒循环能力决定了反应室和再生室内的颗粒更新速率,是循环移动床操作的关键之一。

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5、

The solubility of Ca in liquid manganese and the interaction effect of third element were determined in a sealed Mo reaction chamber by vapor pressure method.

用密封容器气液平衡法,测定了Ca在Mn液中的饱和溶解量及第3组元C、Si、Ni、Al、Cr和As对其的影响。

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6、

According to the purity requirement for Si powder, a cold plasma reaction chamber with long drop distance and high reaction rate is provided in the paper.

根据硅粉纯化的要求,提供了一种长落程和高反应速率的冷等离体反应器。

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7、

Plasma ion diffuses quickly in reaction chamber, the density of it becomes small and the its plasma distribution tends to become uniform.

反应室内等离子体迅速扩散,密度变小,分布趋向于均匀。

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8、

This article firstly introduces the composition of MOCVD, and makes a brief description for each part, mainly the structure of the reaction chamber.

本文首先从MOCVD设备的结构入手,介绍了MOCVD系统的组成,并对各个组成部分功能做了简要描述,重点介绍了反应腔的结构。

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9、

Then they're both released into a different compartment called the reaction chamber, where the chemicals are mixed together with enzymes.

直到被需要时它们就会释放到一个叫做“反应室”的不一样的地方。在这里,化学物质就会与酶混合。

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10、

The temperature field uniformity of the reaction chamber, as the core component of MOCVD, directly influences the quality and properties of materials.

反应室作为MOCVD设备的核心部件,其温度场的均匀性直接影响到生长材料的质量。

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11、

Adopting soft lithography method, we make a PDMA cover piece with the reaction chamber and micro channel.

采用软光刻法制作带有微反应腔和微通道的PDMA盖片。

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12、

Diamond synthesizing technology by cubic press with high-pressure reaction chamber larger than 150cm~ 3

六面顶高压反应腔体积大于150cm~3时的钻石合成技术

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13、

The reaction chamber was patterned with hydrophilic and hydrophobic membrane to realize the automatic supply of water.

电解反应腔壁面覆有图形化的亲水及疏水薄膜,用于实现工质的自动供给。

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14、

Comprehensive consideration on the water flow pattern and economy holds that that the reaction chamber using 3 is more reasonable and scientific.

综合考虑水流流态和经济性认为采用3个反应室是比较合理和科学的。

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15、

The inlet of hydrogen in the reaction chamber much enhances the diamond component in the films.

制备过程中,氢的参与有利于薄膜中金刚石成分的形成。

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16、

The reaction chamber is one of the key parts of PCR biochip.

在PCR生物芯片的制作过程中,微反应腔制作是关键部分之一。

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17、

Study on Inspection Methods of Hot Wall Hydrogenation Reaction Chamber Stainless Steel Repair Welding

关于热壁加氢反应器不锈钢堆焊层检验方法的探讨

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18、

The deposition rate is dropped as pressure in the reaction chamber is increased.

沉积速率随着反应室工作压力的增加而下降。

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19、

The reaction chamber ratio using 2:5:5 the chamber is a good water status.

3个反应室比例为2:5:5时水力状态比较好。

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20、

Urea-SDS-PAGE and Western blotting analysis showed that the contents of major PSII proteins', including the D1 and D2 proteins in the PSII reaction centre ( RC) and the light-harvesting chlorophyll a/ b-protein complex ( LHCII) in periphery, declined with increasing water stress.

尿素-SDS-PAGE和Western杂交分析表明,光系统Ⅱ反应中心蛋白D1、D2及外周捕光色素蛋白复合物LHCⅡ的稳态含量随着水分胁迫的加深而逐步降低,从而影响到光系统Ⅱ活性的变化。

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